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ไทย| 廠牌 | 型號 | F | Configuration |
|---|---|---|---|
| AMAT | CENTRIS (AdvantEdge-GT*6) | MHM Dry Etching(300mm) | Uncertain |
| AMAT | CENTURA AP(Enabler*4) | SiN Seal Dry Etching(SiN)(300mm) | Uncertain |
| ASSEMBLEON(TSMC) | AX-301 (#ASBT31 X2) | – | – |
| Axcelis | GSD-HE | Hi-E IMP(200mm) | 1LP+1 Chamber |
| Axcelis | HE | Hi-E IMP(200mm) | 1LP+1 Chamber |
| Bruker | LA-950 | Filler size ayalyzer(Bumping) | 1 Chamber |
| CAMECA | LEXES FAB-300 | SiGe B Monitor(300mm) | 2 LP+1 Chamber |
| Datacon | 8800 CHAMEO | FC bonder(Bumping) | 1 Chamber |
| Disco | DAD381 | CPS Wafer Saw(Bumping) | 1 Chamber |
| DMS | M300 | Octagon box cleaning(Bumping) | 1 Chamber |
| DNS | LTA1502(2C) | Laser Annealing(300mm) | 3LP+1 Chamber |
| EBARA | UFP300A | Plater(Bumping) | 3LP+3MF+16batch |
| EBARA | EPO112(+) | W CMP(EBARA)(200mm) | 2LP+2MF+1 Chamber |
| EBARA | EPO112(+) | WTU(200mm) | 2LP+2MF+1 Chamber |
| EBARA | EPO112(+) | WTU(200mm) | 2LP+2MF+1 Chamber |
| ESPEC CORP | TCC-150W/AMR-280-UD | TC Test(Bumping) | 1 Chamber |
| EXCICO | LTA1502(2C) | – | – |
| Hanmi | S&P-3500DS | Singulation(Bumping) | Uncertain |
| Heller | 1913MK-III | SMT Reflow oven(Bumping) | 1 Chamber |
| Hitachi | DB-800HS | die attcah(Bumping) | 1 Chamber |
| KAIJO | KAIJO | STD CLEAN/B CLEAN(200mm) | Uncertain |
| KE | DJ-803V | START/ Well Drive In/Gate Oxide(200mm) | 1 Chamber |
| KOSAKA | RSP300-11 | Roughness Monitor(300mm) | Uncertain |
| Lam | G3D | Backside ashing(Bumping) | 3LP+1MF+1Chamber |
| Lintec | RAD3810F12 | BS film laminator(Bumping) | 1 Chamber |
| Lintec | RAD-3600 | Backside coating(Bumping) | Uncertain |
| NISSIN | NH20SR | MED IMPLANT(200mm) | 1 Chamber |
| SUSS | ACS-300 | DFR Developer(Bumping) | 1 Chamber |
| TDK | AFM-1561 | Bonder(Bumping) | 1 Chamber |
| TEL | VDF-615S | START/ Well Drive In/Gate Oxide(200mm) | 1 Chamber |
| TEL | VDF-615S | POCL(.)(200mm) | 1 Chamber |
| 廠牌 | 型號 | F | Configuration |
|---|---|---|---|
| CYMER | ELS-5405 | – | – |
| CYMER | ELS-5400 | – | – |
| DNS | DNS-SR3000-AV | – | – |
| DNS | SS3100 | – | – |
| DNS | SS3200 | – | – |
| JAPAN | PEM-8M | – | – |
| NIKON | G6E-1505G7E | – | – |
| NIKON | G7A-1755G7A | – | – |
| NIKON | G6E-1505G6D | – | – |
| NIKON | NSR-202B | – | – |
| NIKON | NSR-202A+ | – | – |
| NIKON | NSR-2205EX12B | – | – |
| NIKON | NSR-2005i9C | – | – |
| NIKON | NSR-2205i11C | – | – |
| NIKON | NSR-204B | – | – |
| NIKON | NSR-2205i12C | – | – |
| NIKON | NSR-SF200 | – | – |
| NIKON | FX-601 | – | – |
| NIKON | S208D | – | – |
| NIKON | Nikon i7A | – | – |
| NIKON | Nikon i8A | – | – |
| NIKON | 2205i12D | – | – |
| NIKON | Nikon S305C | – | – |
| NIKON | SF130 | – | – |
| 廠牌 | 型號 | Tool | Wafer Size |
|---|---|---|---|
| ADVANTEST | M4632A | Handler | – |
| ADVANTEST | M4541A | Handler | – |
| ADVANTEST | M4542A | Handler | – |
| ADVANTEST | M4612A | Handler | – |
| ADVANTEST | M4632A | Handler | – |
| ADVANTEST | R2172 | Tester | – |
| ADVANTEST | T6573 | Tester | – |
| ADVANTEST | T6577 | Tester | – |
| ADVANTEST | T6671E | Tester | – |
| ADVANTEST | T6672 | Tester | – |
| ADVANTEST | T6673 | Tester | – |
| ADVANTEST | T8571 | Tester | “8 |
| AYC | A206SP | Handler | – |
| AYC | A207 | Handler | – |
| Canon Machinery | CPS-1800R | – | – |
| INTER ACTION | OPT228W | Optical equipment | “8 |
| INTER ACTION | OPT228WR | Optical equipment | “8 |
| INTER ACTION | OPT228WX | Optical equipment | “8 |
| MUSASHI ENGINEERING | Super SX-V2 | – | – |
| PANASONIC | NL-9S | Handler | – |
| SHIBASOKU | S230 | Tester | – |
| TEL | P-8 | Marking Prober | “8 |
| TEL | P-8 | Prober | “8 |
| TERADYNE | A575 | Tester | – |
| TERADYNE | J971 | Tester | – |
| TERADYNE | J971SP | Tester | – |
| TSK | 90A | Prober | “8 |
| TSK | UF1908 | Prober | “8 |
| TSK | UF190A | Prober | “8 |
| TSK | UF200 | Prober | “8 |
| TSK | UF-200 | Prober | “8 |
| TSK | UF-200SA | Prober | “8 |
| TSK | UF200A | Prober | “8 |
| TSK | UF200H | Prober | “8 |
| TSK | UF200H | Prober | – |
| WINTEST | FTOR-3 | Tester | – |
| YOKOGAWA | TS1000 | Tester | – |
| YOKOGAWA | TS-1000 | Tester | – |
| YOKOGAWA | TS500 | Tester | – |
| YOKOGAWA | TS-500AV(HiFi) | Tester | – |
| YOKOGAWA | TS6800 | Tester | – |
| 廠牌 | 型號 | F | Configuration |
|---|---|---|---|
| AMAT | Centris (AdvanEdge-GT) | – | – |
| AMAT | Centris AP (Enabler) | – | – |
| Datacon | 8800 CHAMEO | – | – |
| NIKON | 2205 i12D | – | – |
| 廠牌 | 型號 | 描述 | Configuration |
|---|---|---|---|
| AMAT | EFEM | Buffer station / Mini Environment | – |
| AMAT | E/S MODULE | Process Chamber PSU’s & Controllers | – |
| AMAT | Facillities Module | – | – |
| AMAT | 90 Deg Magent Module | Analyzer Magnet | – |
| AMAT | Gas Cab 7 Position | Analyzer Magnet | – |
| 廠牌 | 型號 | 描述 | Configuration |
|---|---|---|---|
| Nikon | NSR 2205 I12d | Stepper-200mm | – |
| Nikon | NSR 2205 i11D | Lithography Wafer Stepper | – |
| Nikon | NSR-2205i12D | Wafer Steppers | – |
| Nikon | NSR SF200 | Wafer Steppers | – |
| Nikon | NSR-2205EX14C | Wafer Steppers | – |
| Nikon | NSR-4425i | Wafer Steppers | – |
| 廠牌 | 型號 | F | Configuration |
|---|---|---|---|
| ASYST | 200 mm SMS wafer sorter | – | – |
| ASYST | 300mm Sorter EFEM Compact with 2 I/O | – | – |
| ASYST | 300mm Sorter EFEM Compact with 3 I/O | – | – |
| ASYST | 300mm Sorter EFEM Compact with 4 I/O | – | – |
| ASYST | PST Wafer Sorter | – | – |
| ASYST | SMIF INX2200 ASSY | – | – |
| ASYST | SMIF LPO2200 ASSY | – | – |
| ASYST | SMIF LPT2200 ASSY | – | – |
| ASYST | SMIF LPX2200 ASSY | – | – |
| ASYST | SMIF Mini Environment & LPT2200 ASSY | – | – |
| ASYST | SMIF Versaport2200 ASSY | – | – |
| ASYST | VPO2200 Assembly | – | – |
| ASYST | WMS Wafer Sorter | – | – |
| BROOKS | APS2000 2XT Wafer Sorter | – | – |
| BROOKS | APS2000 Wafer Sorter | – | – |
| BROOKS | SCS2000 Wafer Sorter | – | – |
| BROOKS | SCS3000 Wafer Sorter | – | – |
| BROOKS | SCS408 Wafer Sorter | – | – |
| BROOKS | UL408 Wafer Sorter | – | – |
| HCWS | PST DP2200SI/INX Wafer Sorter | – | – |
| HCWS | PST DP3200SI/INX Wafer Sorter | – | – |